Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
James K. Guenter0
Jin K. Kim0
Ralph H. Johnson0
Date of Patent
August 14, 2007
0Patent Application Number
102336250
Date Filed
September 4, 2002
0Patent Primary Examiner
Patent abstract
MBE nitrogen sources of dimethylhydrazine, tertiarybutlyhydrazine, nitrogentrifloride, and NHx radicals. Those nitrogen sources are beneficial in forming nitrogen-containing materials on crystalline subtrates using MBE. Semiconductor lasers in general, and VCSEL in particular, that have nitrogen-containing layers can be formed using such nitrogen sources.
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