US Patent 7258962 Positive-tone radiation-sensitive resin composition

Patent 7258962 was granted and assigned to JSR Corporation on August, 2007 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

JSR Corporation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

72589620

Patent Inventor Names

Takayuki Tsuji0

Tomoki Nagai0

Date of Patent

August 21, 2007

Patent Application Number

111173440

Date Filed

April 29, 2005

Patent Primary Examiner

‌

Rosemary Ashton

Patent abstract

A positive-tone radiation-sensitive resin composition comprising: (A) a carbazole derivative shown by the following formula (1), (B) a photoacid generator containing a sulfonimide compound and an iodonium salt compound as essential components, and (C) an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali, but becomes soluble in alkali when the acid-dissociable group dissociates is disclosed.

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