Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 21, 2007
Patent Application Number
10671539
Date Filed
September 29, 2003
Patent Primary Examiner
Patent abstract
The present invention is related to a method of manufacturing a semiconductor device. In particular, the method of the present invention is related to uniformly irradiating a semiconductor film with laser light. In order to achieve the present invention, a scanning speed of the laser light is changed depending on a position to be irradiated. Particularly, the scanning speed becomes higher as the position gets closer to a center of the substrate.
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