US Patent 7259082 Method of manufacturing semiconductor device
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Patent abstract
The present invention is related to a method of manufacturing a semiconductor device. In particular, the method of the present invention is related to uniformly irradiating a semiconductor film with laser light. In order to achieve the present invention, a scanning speed of the laser light is changed depending on a position to be irradiated. Particularly, the scanning speed becomes higher as the position gets closer to a center of the substrate.
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US Patent 07259082 Method of manufacturing semiconductor device US Patent 7259082 Method of manufacturing semiconductor device
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Patent Number
0725908200
Patent Number
725908200
Edits on 25 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
072590820
Date of Patent
August 21, 2007
0Patent Application Number
106715390
Date Filed
September 29, 2003
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
072590820
Date of Patent
August 21, 2007
0Patent Application Number
106715390
Date Filed
September 29, 2003
0Official Website
Patent Primary Examiner
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US Patent 07259082 Method of manufacturing semiconductor device
Infobox
Is a
Patent jurisdiction
Patent number
07259082
Date of patent
August 21, 2007
Patent application number
10671539
Date Filed
September 29, 2003
Patent primary examiner
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