Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 21, 2007
0Patent Application Number
107922460
Date Filed
March 3, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A mask fabrication system. The mask fabrication system contains a processing tool, a metrology tool, and a controller. The processing tool processes a mask. The metrology tool inspects the mask to obtain an inspection result. The controller generates a manufacturing model of the processing tool and calibrates the manufacturing model according to a device data, a material data, and the inspection result of the mask.
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