Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tsutomu Shoki0
Date of Patent
August 28, 2007
0Patent Application Number
090526700
Date Filed
March 31, 1998
0Patent Primary Examiner
Patent abstract
An x-ray mask blank and an x-ray mask wherein, assuming that Ramax and Ramin are defined as a maximum value of Ra and a minimum value of Ra of a surface roughness (Ra: center-line average roughness) on a plurality of points within a predetermined area on an x-ray membrane 12, respectively, the surface of the x-ray membrane 12 has a surface condition so that it may satisfy an expression: (Ramax−Ramin)/(Ramax+Ramin)≦0.15.
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