US Patent 7261980 X-ray mask blank and x-ray mask
Patent 7261980 was granted and assigned to Hoya Corporation on August, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
Tsutomu Shoki0
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Patent abstract
An x-ray mask blank and an x-ray mask wherein, assuming that Ramax and Ramin are defined as a maximum value of Ra and a minimum value of Ra of a surface roughness (Ra: center-line average roughness) on a plurality of points within a predetermined area on an x-ray membrane 12, respectively, the surface of the x-ray membrane 12 has a surface condition so that it may satisfy an expression: (Ramax−Ramin)/(Ramax+Ramin)≦0.15.
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US Patent 07261980 X-ray mask blank and x-ray mask US Patent 7261980 X-ray mask blank and x-ray mask
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Patent Number
072619800
Patent Number
72619800
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Current Assignee
Patent Jurisdiction
Patent Number
072619800
Date of Patent
August 28, 2007
0Patent Application Number
090526700
Date Filed
March 31, 1998
0Official Website
Patent Primary Examiner
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US Patent 07261980 X-ray mask blank and x-ray mask
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07261980
Date of patent
August 28, 2007
Patent application number
09052670
Date Filed
March 31, 1998
Patent primary examiner
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