Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Willem Dirk Van Amstel0
Date of Patent
September 25, 2007
Patent Application Number
10549884
Date Filed
March 18, 2004
Patent Primary Examiner
Patent abstract
A post-objective scanning device using a rotatable polygon mirror has a correction system for achieving telecentric scanning with a well-corrected scanning spot. A mirror facet tracker is provided to obtain high radiation efficiency and optimum use of the correction system. The facet tracker may be an active device including an additional beam deflector or a passive device including a facet tracking mirror.
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