US Patent 7274498 Post-objective scanning device
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Patent Inventor Names
Willem Dirk Van Amstel0
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Patent abstract
A post-objective scanning device using a rotatable polygon mirror has a correction system for achieving telecentric scanning with a well-corrected scanning spot. A mirror facet tracker is provided to obtain high radiation efficiency and optimum use of the correction system. The facet tracker may be an active device including an additional beam deflector or a passive device including a facet tracking mirror.
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US Patent 07274498 Post-objective scanning device US Patent 7274498 Post-objective scanning device
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Patent Number
07274498
Patent Number
7274498
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US Patent 07274498 Post-objective scanning device
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Patent jurisdiction
Patent number
07274498
Date of patent
September 25, 2007
Patent application number
10549884
Date Filed
March 18, 2004
Patent primary examiner
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