US Patent 7279693 Source multiplexing in lithography
Patent 7279693 was granted and assigned to Intel on October, 2007 by the United States Patent and Trademark Office.
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Patent abstract
An illumination system for an extreme ultraviolet (EUV) lithography system may include multiple sources of EUV light. The system may combine the light from the multiple sources when illuminating a mask.
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US Patent 07279693 Source multiplexing in lithography US Patent 7279693 Source multiplexing in lithography
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Patent Number
0727969300
Patent Number
727969300
Edits on 3 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072796930
Date of Patent
October 9, 2007
0Patent Application Number
111961910
Date Filed
August 2, 2005
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072796930
Date of Patent
October 9, 2007
0Patent Application Number
111961910
Date Filed
August 2, 2005
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
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US Patent 07279693 Source multiplexing in lithography
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07279693
Date of patent
October 9, 2007
Patent application number
11196191
Date Filed
August 2, 2005
Patent primary examiner
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