Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takeshi Kawakami0
Date of Patent
October 16, 2007
0Patent Application Number
105438080
Date Filed
April 19, 2004
0Patent Primary Examiner
Patent abstract
A highly reliable surface acoustic wave device includes a low-resistance piezoelectric substrate that is difficult to reoxidize even in a high-temperature atmosphere containing oxygen. The piezoelectric substrate has a specific resistance of about 1.0×107 Ω·cm to about 1.0×1013 Ω·cm, an interdigital electrode on a main surface of the substrate, and a protective film covering the interdigital electrode.
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