US Patent 7282835 Surface acoustic wave element
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Patent Inventor Names
Takeshi Kawakami0
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Patent abstract
A highly reliable surface acoustic wave device includes a low-resistance piezoelectric substrate that is difficult to reoxidize even in a high-temperature atmosphere containing oxygen. The piezoelectric substrate has a specific resistance of about 1.0×107 Ω·cm to about 1.0×1013 Ω·cm, an interdigital electrode on a main surface of the substrate, and a protective film covering the interdigital electrode.
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US Patent 07282835 Surface acoustic wave element US Patent 7282835 Surface acoustic wave element
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Patent Number
072828350
Patent Number
72828350
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Patent Number
072828350
Date of Patent
October 16, 2007
0Patent Application Number
105438080
Date Filed
April 19, 2004
0Official Website
Patent Primary Examiner
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US Patent 07282835 Surface acoustic wave element
Infobox
Is a
Patent jurisdiction
Patent number
07282835
Date of patent
October 16, 2007
Patent application number
10543808
Date Filed
April 19, 2004
Patent primary examiner
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