Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Andrew John Church0
Brad Scott Tarter0
Kazuaki Takano0
Thomas R. Jones0
Date of Patent
October 16, 2007
0Patent Application Number
109016960
Date Filed
July 29, 2004
0Patent Primary Examiner
Patent abstract
A conductive anti-reflection coating has a surface quarterwave layer that is broken up into smaller portions by inserting one or more thin layers of conductive material in the dielectric material. The resulting stack of alternating layers of a dielectric material and an electrically conductive material provides a solid electrical contact to the buried conductive layer and exhibits a low surface contact resistance.
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