US Patent 7283303 Conductive anti-reflection coating
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Patent Inventor Names
Andrew John Church0
Brad Scott Tarter0
Kazuaki Takano0
Thomas R. Jones0
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Patent abstract
A conductive anti-reflection coating has a surface quarterwave layer that is broken up into smaller portions by inserting one or more thin layers of conductive material in the dielectric material. The resulting stack of alternating layers of a dielectric material and an electrically conductive material provides a solid electrical contact to the buried conductive layer and exhibits a low surface contact resistance.
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US Patent 07283303 Conductive anti-reflection coating US Patent 7283303 Conductive anti-reflection coating
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Patent Number
072833030
Patent Number
72833030
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Patent Jurisdiction
Patent Number
072833030
Date of Patent
October 16, 2007
0Patent Application Number
109016960
Date Filed
July 29, 2004
0Official Website
Patent Primary Examiner
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US Patent 07283303 Conductive anti-reflection coating
Infobox
Is a
Patent jurisdiction
Patent number
07283303
Date of patent
October 16, 2007
Patent application number
10901696
Date Filed
July 29, 2004
Patent primary examiner
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