Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alexander Tregub0
Susan Holl0
Tim T. Chen0
Date of Patent
October 30, 2007
0Patent Application Number
112264890
Date Filed
September 13, 2005
0Patent Primary Examiner
Patent abstract
A pellicle made of a polymer material contains fullerenes within the polymer material to reduce the damaging effects of radiation that is transmitted through the pellicle during an exposure operation. The fullerenes may comprise nanotubes and/or buckyballs. The buckyballs may also enclose molecules of a gas that further reduce the damaging effects of the radiation on the polymer material.
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