Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
George D. Papasouliotis0
Date of Patent
October 30, 2007
0Patent Application Number
114144590
Date Filed
April 28, 2006
0Patent Citations Received
Patent Primary Examiner
0
Patent abstract
Conformal dielectric deposition processes supplemented with a deposited expansion material can fill high aspect ratio narrow width gaps with significantly reduced incidence of voids or weak spots. The technique can also be used generally to form composites, such as for the densification of any substrate having open spaces or gaps to be filled without the incidence of voids or seams.
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