US Patent 7288463 Pulsed deposition layer gap fill with expansion material
Patent 7288463 was granted and assigned to Novellus Systems on October, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 28, 2006
0
Date of Patent
October 30, 2007
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Patent Application Number
11414459
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Patent Citations Received
Patent Inventor Names
George D. Papasouliotis
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Patent Jurisdiction
Patent Number
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