Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Warren Jackson0
Date of Patent
November 6, 2007
0Patent Application Number
114144110
Date Filed
April 28, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method and system for facilitating etching. Specifically, the method includes incorporating a fluorescent marker in a layer of a grouping of patterned layers. Etching of the group of patterned layers is controlled based upon the fluorescent marker.
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