Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
November 13, 2007
Patent Application Number
11484049
Date Filed
July 11, 2006
Patent Primary Examiner
Patent abstract
Low dielectric materials and films comprising same have been identified for improved performance when used as performance materials, for example, in interlevel dielectrics integrated circuits as well as methods for making same. In one aspect of the present invention, the performance of the dielectric material may be improved by controlling the weight percentage of ethylene oxide groups in the at least one porogen.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.