Patent 7294585 was granted and assigned to AIR PRODUCTS AND CHEMICALS, INC. on November, 2007 by the United States Patent and Trademark Office.
Low dielectric materials and films comprising same have been identified for improved performance when used as performance materials, for example, in interlevel dielectrics integrated circuits as well as methods for making same. In one aspect of the present invention, the performance of the dielectric material may be improved by controlling the weight percentage of ethylene oxide groups in the at least one porogen.