Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bin Yu0
Wiley Eugene Hill0
Date of Patent
November 20, 2007
0Patent Application Number
111301610
Date Filed
May 17, 2005
0Patent Primary Examiner
Patent abstract
A method of doping fins of a semiconductor device that includes a substrate includes forming multiple fin structures on the substrate, each of the fin structures including a cap formed on a fin. The method further includes performing a first tilt angle implant process to dope a first pair of the multiple fin structures with n-type impurities and performing a second tilt angle implant process to dope a second pair of the multiple fin structures with p-type impurities.
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