Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 4, 2007
Patent Application Number
10519451
Date Filed
July 7, 2003
Patent Primary Examiner
Patent abstract
A method for oxidation of an object to be processed is provided wherein an oxide film can provide favorable film quality and a laminate structure of nitride film and oxide film can be obtained by a thermal oxidation of a nitride film.
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