US Patent 7304002 Method of oxidizing member to be treated
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Patent abstract
A method for oxidation of an object to be processed is provided wherein an oxide film can provide favorable film quality and a laminate structure of nitride film and oxide film can be obtained by a thermal oxidation of a nitride film.
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US Patent 07304002 Method of oxidizing member to be treated US Patent 7304002 Method of oxidizing member to be treated
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Patent Number
0730400200
Patent Number
730400200
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Official Website
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Is a
Patent Jurisdiction
Patent Number
073040020
Date of Patent
December 4, 2007
0Patent Application Number
105194510
Date Filed
July 7, 2003
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073040020
Date of Patent
December 4, 2007
0Patent Application Number
105194510
Date Filed
July 7, 2003
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
Golden AI
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US Patent 07304002 Method of oxidizing member to be treated
Infobox
Is a
Patent jurisdiction
Patent number
07304002
Date of patent
December 4, 2007
Patent application number
10519451
Date Filed
July 7, 2003
Patent primary examiner
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