Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jeffrey Alan Hawthorne0
M. Brandon Steele0
Chunho Kim0
David C. Sowell0
Date of Patent
December 11, 2007
0Patent Application Number
107716280
Date Filed
February 3, 2004
0Patent Primary Examiner
Patent abstract
A method and system for identifying a defect or contamination on a surface of a material. The method and system involves providing a material, such as a semiconductor wafer, using a non-vibrating contact potential difference sensor to scan the wafer, generate contact potential difference data and processing that data to identify a pattern characteristic of the defect or contamination.
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