Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert J. Kavanagh0
Young C. Bae0
Date of Patent
December 18, 2007
0Patent Application Number
110755450
Date Filed
March 8, 2005
0Patent Primary Examiner
Patent abstract
Cyanoadamantyl compounds, polymers that comprise polymerized units of such compounds, and photoresist compositions that comprise such polymers are provided. Preferred polymers of the invention are employed in photoresists imaged at wavelengths less than 250 nm such as 248 nm and 193 nm.
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