US Patent 7309750 Cyanoadamantyl compounds and polymers
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Patent Inventor Names
Robert J. Kavanagh0
Young C. Bae0
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Patent abstract
Cyanoadamantyl compounds, polymers that comprise polymerized units of such compounds, and photoresist compositions that comprise such polymers are provided. Preferred polymers of the invention are employed in photoresists imaged at wavelengths less than 250 nm such as 248 nm and 193 nm.
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US Patent 07309750 Cyanoadamantyl compounds and polymers US Patent 7309750 Cyanoadamantyl compounds and polymers
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Patent Number
073097500
Patent Number
73097500
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Patent Jurisdiction
Patent Number
073097500
Date of Patent
December 18, 2007
0Patent Application Number
110755450
Date Filed
March 8, 2005
0Official Website
Patent Primary Examiner
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US Patent 07309750 Cyanoadamantyl compounds and polymers
Infobox
Is a
Patent jurisdiction
Patent number
07309750
Date of patent
December 18, 2007
Patent application number
11075545
Date Filed
March 8, 2005
Patent primary examiner
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