Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Fu-Chang Lo0
Paul Zimmerman0
Alexander Tregub0
Florence Eschbach0
Date of Patent
January 8, 2008
0Patent Application Number
106493550
Date Filed
August 26, 2003
0Patent Primary Examiner
Patent abstract
A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass through the pellicle to the reticle and may prevent particles from passing through the pellicle.
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