US Patent 7316869 Mounting a pellicle to a frame
Patent 7316869 was granted and assigned to Intel on January, 2008 by the United States Patent and Trademark Office.
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Patent Inventor Names
Alexander Tregub0
Florence Eschbach0
Fu-Chang Lo0
Paul Zimmerman0
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Patent abstract
A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass through the pellicle to the reticle and may prevent particles from passing through the pellicle.
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US Patent 07316869 Mounting a pellicle to a frame US Patent 7316869 Mounting a pellicle to a frame
Infobox
Patent Number
073168690
Patent Number
73168690
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
073168690
Date of Patent
January 8, 2008
0Patent Application Number
106493550
Date Filed
August 26, 2003
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
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US Patent 07316869 Mounting a pellicle to a frame
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07316869
Date of patent
January 8, 2008
Patent application number
10649355
Date Filed
August 26, 2003
Patent primary examiner
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