Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wen Yi Zhang0
Weng Yee Kwong0
Date of Patent
January 8, 2008
0Patent Application Number
111154100
Date Filed
April 27, 2005
0Patent Primary Examiner
Patent abstract
A method of TEM sample preparation from a circuit layer structure, the method comprising electron-beam assisted deposition of a first protective layer over a site of interest of the circuit layer structure; ion-beam assisted deposition of a second protective layer over the first protective layer; and ion-beam milling at the site of interest through the first and second protective layers.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
