US Patent 7319068 Method of depositing low k barrier layers
Patent 7319068 was granted and assigned to Applied Materials on January, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 2, 2006
0
Date of Patent
January 15, 2008
0
Patent Application Number
11537928
0
Patent Inventor Names
Li-Qun Xia
0
Louis Yang
0
Ping Xu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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