US Patent 7319527 Sensor with cantilever and optical resonator

Patent 7319527 was granted and assigned to University of Basel on January, 2008 by the United States Patent and Trademark Office.

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Patent Inventor Names

Hans Joseph Hug0

Patrick Louis Theodorus Martin Frederix0

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Patent abstract

An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever (3) using an optical resonator between the cantilever (3) and an output surface (12b) of a lens assembly (10). In order to form the resonator, output surface (12b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly (10) and cantilever (3) comparatively large.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=073195270

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