Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Pushkara Rao Varanasi0
Sean D. Burns0
Wu-Song S. Huang0
Date of Patent
January 22, 2008
0Patent Application Number
109803650
Date Filed
November 3, 2004
0Patent Primary Examiner
Patent abstract
A top anti-reflective coating material (TARC) and barrier layer, and the use thereof in lithography processes, is disclosed. The TARC/barrier layer may be especially useful for immersion lithography using water as the imaging medium. The TARC/barrier layer comprises a polymer which comprises at least one silicon-containing moiety and at least one aqueous base soluble moiety. Suitable polymers include polymers having a silsesquioxane (ladder or network) structure, such as polymers containing monomers having the structure:
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