US Patent 7322287 Apparatus for fluid pressure imprint lithography
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Patent abstract
Improved apparatus for imprint lithography involves using direct fluid pressure to press a mold into a substrate-supported film. Advantageously the mold and/or substrate are sufficiently flexible to provide wide area contact under the fluid pressure. Fluid pressing can be accomplished by sealing the mold against the film and disposing the resulting assembly in a pressurized chamber. The result of this fluid pressing is enhanced resolution and high uniformity over an enlarged area.
Edits on 4 Aug, 2023
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Patent Jurisdiction
Patent Number
73222870
Date of Patent
January 29, 2008
0Patent Application Number
109263760
Date Filed
August 25, 2004
0Patent Primary Examiner
Edits on 23 May, 2023
Golden AI
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US Patent 07322287 Apparatus for fluid pressure imprint lithography US Patent 7322287 Apparatus for fluid pressure imprint lithography
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Patent Number
0732228700
Patent Number
732228700
Edits on 20 May, 2023
Golden AI
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Official Website
Edits on 2 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073222870
Date of Patent
January 29, 2008
0Patent Application Number
109263760
Date Filed
August 25, 2004
0Official Website
Patent Primary Examiner
Edits on 22 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073222870
Date of Patent
January 29, 2008
0Patent Application Number
109263760
Date Filed
August 25, 2004
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
Golden AI
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Infobox (+1 properties)
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Edits on 23 Nov, 2021
Golden AI
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US Patent 07322287 Apparatus for fluid pressure imprint lithography
Infobox
Is a
Patent jurisdiction
Patent number
07322287
Date of patent
January 29, 2008
Patent application number
10926376
Date Filed
August 25, 2004
Patent primary examiner
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