US Patent 7323421 Silicon wafer etching process and composition
Patent 7323421 was granted and assigned to MEMC Electronic Materials on January, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 14, 2005
0
Date of Patent
January 29, 2008
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Patent Application Number
11152362
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Patent Inventor Names
James R. Capstick
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Jozef G. Vermeire
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Judith A. Schmidt
0
Mick Bjelopavlic
0
Mark G. Stinson
0
Thomas E. Doane
0
Alexis Grabbe
0
Guoqiang (David) Zhang
0
Henry F. Erk
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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