US Patent 7327439 Lithographic apparatus and device manufacturing method
All edits
Edits on 18 Apr, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Edits on 14 Sep, 2023
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 1 Sep, 2023
Golden AI
Edits made to:
Article (+470 characters)
Article
Patent abstract
A lithographic apparatus is disclosed. The apparatus includes an illumination system arranged to condition a radiation beam, and an article support configured to support an article to be placed in a beam path of the radiation beam. The article support includes a plurality of bonded layers. At least one of the bonded layers includes a plurality of recesses facing another of the bonded layers, so as to reduce a bonding surface between the bonded layers.
Edits on 23 May, 2023
Golden AI
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
Edits on 23 May, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07327439 Lithographic apparatus and device manufacturing method US Patent 7327439 Lithographic apparatus and device manufacturing method
Infobox
Patent Number
0732743900
Patent Number
732743900
Edits on 27 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073274390
Date of Patent
February 5, 2008
0Patent Application Number
109888320
Date Filed
November 16, 2004
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073274390
Date of Patent
February 5, 2008
0Patent Application Number
109888320
Date Filed
November 16, 2004
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
Edits on 23 Nov, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07327439 Lithographic apparatus and device manufacturing method
Infobox
Is a
Patent jurisdiction
Patent number
07327439
Date of patent
February 5, 2008
Patent application number
10988832
Date Filed
November 16, 2004
Patent primary examiner
Find more entities like US Patent 7327439 Lithographic apparatus and device manufacturing method
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
