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US Patent 11754929 Substrate holder and method of manufacturing a substrate holder

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Inventor Names

Raymond Wilhelmus Louis Lafarre

Yogesh Pramod Karade

Nina Vladimirovna Dziomkina

Sjoerd Nicolaas Lambertus Donders

Elisabeth Corinne Rodenburg

Nicolaas Ten Kate

Date of Patent

September 12, 2023

Patent Application Number

17856520

Date Filed

July 1, 2022

Patent Citations

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US Patent 9442395 Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder

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Patent Primary Examiner

CPC Code

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A substrate holder for use in a lithographic apparatus, the substrate holder including: a main body; a plurality of first burls provided on a first side of the main body and having end surfaces to support a substrate, wherein the first burls each include CrN; and a plurality of second burls provided on a second side of the main body.

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