Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 24, 2012
Patent Application Number
12389077
Date Filed
February 19, 2009
Patent Citations Received
Patent Primary Examiner
Patent abstract
A lithographic apparatus is configured to transfer a pattern from a patterning structure, held by a patterning structure holder, onto a substrate that is held by a substrate holder. The apparatus includes a first object holder configured to hold an object, and an object temperature conditioner configured to condition a temperature of the object prior to and/or during transfer of the object to the first object holder. The object temperature conditioner includes a second object holder having a fluid duct system and an electrical temperature conditioner.
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