US Patent 7327456 Spectrophotometer, ellipsometer, polarimeter and the like systems

Patent 7327456 was granted and assigned to J.A. Woollam Co., Inc. on February, 2008 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

J.A. Woollam Co., Inc.

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7327456

Date of Patent

February 5, 2008

Patent Application Number

11145470

Date Filed

June 6, 2005

Patent Primary Examiner

‌

Roy M Punnoose

Patent abstract

Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.

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