US Patent 7327456 Spectrophotometer, ellipsometer, polarimeter and the like systems
Patent 7327456 was granted and assigned to J.A. Woollam Co., Inc. on February, 2008 by the United States Patent and Trademark Office.
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Patent abstract
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
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US Patent 07327456 Spectrophotometer, ellipsometer, polarimeter and the like systems US Patent 7327456 Spectrophotometer, ellipsometer, polarimeter and the like systems
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Patent Number
0732745600
Patent Number
732745600
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
073274560
Date of Patent
February 5, 2008
0Patent Application Number
111454700
Date Filed
June 6, 2005
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
073274560
Date of Patent
February 5, 2008
0Patent Application Number
111454700
Date Filed
June 6, 2005
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
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US Patent 07327456 Spectrophotometer, ellipsometer, polarimeter and the like systems
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07327456
Date of patent
February 5, 2008
Patent application number
11145470
Date Filed
June 6, 2005
Patent primary examiner
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