Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 26, 2008
Patent Application Number
10885675
Date Filed
July 8, 2004
Patent Primary Examiner
Patent abstract
A laser annealing apparatus for sequential lateral solidification (SLS) to uniformly crystallize silicon on an entire silicon substrate by minimizing the dislocation of the silicon substrate during laser beam irradiation is disclosed.
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