US Patent 7335260 Laser annealing apparatus
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Patent abstract
A laser annealing apparatus for sequential lateral solidification (SLS) to uniformly crystallize silicon on an entire silicon substrate by minimizing the dislocation of the silicon substrate during laser beam irradiation is disclosed.
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US Patent 07335260 Laser annealing apparatus US Patent 7335260 Laser annealing apparatus
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Patent Number
0733526000
Patent Number
733526000
Edits on 28 Apr, 2023
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Patent Jurisdiction
Patent Number
073352600
Date of Patent
February 26, 2008
0Patent Application Number
108856750
Date Filed
July 8, 2004
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
073352600
Date of Patent
February 26, 2008
0Patent Application Number
108856750
Date Filed
July 8, 2004
0Official Website
Patent Primary Examiner
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US Patent 07335260 Laser annealing apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07335260
Date of patent
February 26, 2008
Patent application number
10885675
Date Filed
July 8, 2004
Patent primary examiner
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