US Patent 7338723 Aluminum nitride substrate and production method

Patent 7338723 was granted and assigned to NGK Insulators on March, 2008 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

NGK Insulators

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

73387230

Patent Inventor Names

Akiyoshi Hattori0

Date of Patent

March 4, 2008

Patent Application Number

110810930

Date Filed

March 15, 2005

Patent Primary Examiner

‌

Jennifer McNeil

Patent abstract

An aluminum nitride substrate comprises a planar sintered aluminum nitride body containing carbon including free carbon and a substantially planar electrode buried in the sintered aluminum nitride body. The sintered aluminum nitride body includes a work mounting portion for placing a work thereon and a base layer having the electrode buried therein. The average concentration of free carbon in the work mounting portion different from the average concentration of free carbon in the base layer.

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