US Patent 7338723 Aluminum nitride substrate and production method

Patent 7338723 was granted and assigned to NGK Insulators on March, 2008 by the United States Patent and Trademark Office.

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Patent Inventor Names

Akiyoshi Hattori0

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Patent abstract

An aluminum nitride substrate comprises a planar sintered aluminum nitride body containing carbon including free carbon and a substantially planar electrode buried in the sintered aluminum nitride body. The sintered aluminum nitride body includes a work mounting portion for placing a work thereon and a base layer having the electrode buried therein. The average concentration of free carbon in the work mounting portion different from the average concentration of free carbon in the base layer.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=073387230

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