US Patent 7354781 Method of manufacturing field emission device
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Patent abstract
A method of manufacturing a field emission device (FED) using a photoresist for performing multi-patterning processes, whereby different structures can be multi-patterned using a single photoresist mask. The photoresist has a solubility to a solvent by post-exposure heat-treatment, and a complicated structure can be formed using the photoresist.
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US Patent 07354781 Method of manufacturing field emission device US Patent 7354781 Method of manufacturing field emission device
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Patent Number
0735478100
Patent Number
735478100
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Patent Jurisdiction
Patent Number
073547810
Date of Patent
April 8, 2008
0Patent Application Number
114352850
Date Filed
May 17, 2006
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073547810
Date of Patent
April 8, 2008
0Patent Application Number
114352850
Date Filed
May 17, 2006
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
Golden AI
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US Patent 07354781 Method of manufacturing field emission device
Infobox
Is a
Patent jurisdiction
Patent number
07354781
Date of patent
April 8, 2008
Patent application number
11435285
Date Filed
May 17, 2006
Patent primary examiner
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