Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 8, 2008
Patent Application Number
11030500
Date Filed
January 6, 2005
Patent Primary Examiner
Patent abstract
A method of junction delineation of non-epitaxial wafers comprises the steps of preparing a sample of the wafer, staining the sample using a mixture of between one and three parts hydrofluoric acid to fifty parts nitric acid to twenty parts water, and scanning the sample with a scanning electron microscope.
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