Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Taber H. Smith0
David White0
Vikas Mehrotra0
Date of Patent
April 8, 2008
Patent Application Number
10947195
Date Filed
September 22, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method and system are described to reduce process variation as a result of the electrochemical deposition (ECD), also referred to as electrochemical plating (ECP), and chemical mechanical polishing (CMP) processing of films in integrated circuit manufacturing processes. The described methods use process variation and electrical impact to direct the insertion of dummy fill into an integrated circuit.
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