Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
M. Dalil Rahman0
Francis M. Houlihan0
Date of Patent
April 15, 2008
Patent Application Number
10439753
Date Filed
May 16, 2003
Patent Primary Examiner
Patent abstract
The present invention relates to a novel photoactive compounds that can be used in formulating photoresist compositions.
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