US Patent 7358408 Photoactive compounds
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Patent Inventor Names
Francis M. Houlihan0
M. Dalil Rahman0
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Patent abstract
The present invention relates to a novel photoactive compounds that can be used in formulating photoresist compositions.
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US Patent 07358408 Photoactive compounds US Patent 7358408 Photoactive compounds
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Patent Number
07358408
Patent Number
7358408
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US Patent 07358408 Photoactive compounds
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Is a
Patent jurisdiction
Patent number
07358408
Date of patent
April 15, 2008
Patent application number
10439753
Date Filed
May 16, 2003
Patent primary examiner
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