Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Erik Roelof Loopstra0
Jozef Maria Finders0
Date of Patent
April 15, 2008
0Patent Application Number
114404370
Date Filed
May 25, 2006
0Patent Primary Examiner
Patent abstract
A lithographic apparatus is disclosed that has a heater configured to supply energy to a patterning device to heat the patterning device to form a desired thermal distortion pattern of the patterning device and a controller configured to effect an optical correction in the apparatus corresponding to the desired thermal distortion pattern to reduce the effect of thermal distortion of the patterning device on a pattern.
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