US Patent 7359029 Lithographic apparatus and method of reducing thermal distortion
All edits
Edits on 16 Sep, 2023
Golden AI
Edits made to:
Infobox (+2 properties)
Infobox
Patent Inventor Names
Erik Roelof Loopstra0
Jozef Maria Finders0
Edits on 1 Sep, 2023
Golden AI
Edits made to:
Article (+436 characters)
Article
Patent abstract
A lithographic apparatus is disclosed that has a heater configured to supply energy to a patterning device to heat the patterning device to form a desired thermal distortion pattern of the patterning device and a controller configured to effect an optical correction in the apparatus corresponding to the desired thermal distortion pattern to reduce the effect of thermal distortion of the patterning device on a pattern.
Edits on 26 May, 2023
Golden AI
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
Edits on 18 May, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07359029 Lithographic apparatus and method of reducing thermal distortion US Patent 7359029 Lithographic apparatus and method of reducing thermal distortion
Infobox
Patent Number
073590290
Patent Number
73590290
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073590290
Date of Patent
April 15, 2008
0Patent Application Number
114404370
Date Filed
May 25, 2006
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
Edits on 25 Nov, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07359029 Lithographic apparatus and method of reducing thermal distortion
Infobox
Is a
Patent jurisdiction
Patent number
07359029
Date of patent
April 15, 2008
Patent application number
11440437
Date Filed
May 25, 2006
Patent primary examiner
Find more entities like US Patent 7359029 Lithographic apparatus and method of reducing thermal distortion
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
